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NEC Electronics America Roseville Fab
Purchases enTune™
Advanced Process Control Platform Software from Yield Dynamics
Fab Benefits
from Run-to-Run Control Through Yield Dynamics'
Advanced Process Control
Platform and Chemical-Mechanical Polishing Application
Santa Clara, CA, May 27, 2003
–
NEC Electronics
America, Inc. announced today that it has implemented Yield Dynamics' enTune™ run-to-run advanced process control (APC) platform in its
Roseville, California, semiconductor manufacturing fab. NEC
Electronics America made a purchase of enTune to automate and improve the
capability of its chemical-mechanical polish (CMP) process.
Yield Dynamics' enTune product provides a
fab-wide infrastructure to implement APC throughout all fabrication steps,
along with a suite of advanced applications that provide automated
feedback and feed-forward control for CMP, chemical/physical vapor
deposition (CVD/PVD), etch, diffusion and lithography (overlay and
critical dimension). Recipe settings for each lot or wafer are
changed dynamically by enTune to optimize process performance and product
yield.
"After NEC Electronics America's
engineering team evaluated commercially available APC products, we
determined enTune was the best fit for our requirements based on its
robust software design, advanced control applications, and its
platform-based architecture that enables APC to scale our entire fab for a
broad set of control applications," said Steve Toy, equipment
engineering manager, NEC Electronics America. "The initial
processing results in the CMP area have confirmed that we made the right
choice, and we expect a rapid return on our investment for this
project."
"We're excited to have achieved such
significant and measurable results with the adoption of our patented APC
infrastructure and advanced CMP application at NEC Electronics America's
manufacturing fab," said Dr. Jonathan Buckheit, CEO, Yield Dynamics.
"We are looking forward to collaborating further with NEC Electronics
America for our entire suite of applications, whereupon the value will
become even more dramatic."
About NEC Electronics America, Inc.
NEC Electronics America, Inc.,
headquartered in Santa Clara, California, is a wholly owned subsidiary of
NEC Electronics Corporation, a leading provider of semiconductor products
encompassing advanced technology solutions for the broadband and
communications markets; system solutions for the mobile, PC, automotive
and digital consumer markets; and platform solutions for a wide range of
customer applications. NEC Electronics America offers solutions
ranging from standard products to system-on-a-chip (SoC) solutions,
customized products for next-generation designs, a local manufacturing
facility in Roseville, California, and the global manufacturing
capabilities of its parent company. NEC Electronics America is also
the North American sales and marketing channel of NEC AM-LCD and PDP
modules. More information about the products offered by NEC Electronics
America, Inc. can be found at http://www.necelam.com .
NOTE: NEC Electronics America, Inc.
is a trademark or registered trademark of NEC Electronics Corporation in
the United States and/or other countries. Yield Dynamics and enTune
are trademarks or registered trademarks of Yield Dynamics, Inc.

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