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NEC Electronics America Roseville Fab Purchases enTune™
Advanced Process Control Platform Software from Yield Dynamics

Fab Benefits from Run-to-Run Control Through Yield Dynamics'
Advanced Process Control Platform and Chemical-Mechanical Polishing Application

Santa Clara, CA, May 27, 2003 NEC Electronics America, Inc. announced today that it has implemented Yield Dynamics' enTune™ run-to-run advanced process control (APC) platform in its Roseville, California, semiconductor manufacturing fab.  NEC Electronics America made a purchase of enTune to automate and improve the capability of its chemical-mechanical polish (CMP) process.

Yield Dynamics' enTune product provides a fab-wide infrastructure to implement APC throughout all fabrication steps, along with a suite of advanced applications that provide automated feedback and feed-forward control for CMP, chemical/physical vapor deposition (CVD/PVD), etch, diffusion and lithography (overlay and critical dimension).  Recipe settings for each lot or wafer are changed dynamically by enTune to optimize process performance and product yield.

"After NEC Electronics America's engineering team evaluated commercially available APC products, we determined enTune was the best fit for our requirements based on its robust software design, advanced control applications, and its platform-based architecture that enables APC to scale our entire fab for a broad set of control applications," said Steve Toy, equipment engineering manager, NEC Electronics America.  "The initial processing results in the CMP area have confirmed that we made the right choice, and we expect a rapid return on our investment for this project."

"We're excited to have achieved such significant and measurable results with the adoption of our patented APC infrastructure and advanced CMP application at NEC Electronics America's manufacturing fab," said Dr. Jonathan Buckheit, CEO, Yield Dynamics.  "We are looking forward to collaborating further with NEC Electronics America for our entire suite of applications, whereupon the value will become even more dramatic."

About NEC Electronics America, Inc.

NEC Electronics America, Inc., headquartered in Santa Clara, California, is a wholly owned subsidiary of NEC Electronics Corporation, a leading provider of semiconductor products encompassing advanced technology solutions for the broadband and communications markets; system solutions for the mobile, PC, automotive and digital consumer markets; and platform solutions for a wide range of customer applications.  NEC Electronics America offers solutions ranging from standard products to system-on-a-chip (SoC) solutions, customized products for next-generation designs, a local manufacturing facility in Roseville, California, and the global manufacturing capabilities of its parent company.  NEC Electronics America is also the North American sales and marketing channel of NEC AM-LCD and PDP modules. More information about the products offered by NEC Electronics America, Inc. can be found at http://www.necelam.com .

NOTE: NEC Electronics America, Inc. is a trademark or registered trademark of NEC Electronics Corporation in the United States and/or other countries.  Yield Dynamics and enTune are trademarks or registered trademarks of Yield Dynamics, Inc.

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