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Publications

2003

	Developing and Implementing an Advanced CMP Run-to-Run Controller.  MICRO Magazine, August, 2003.
	Computationally Efficient Modeling of Wafer Temperatures in a LPCVD Furnace.  Proc. Fourth European AEC/APC Conference, March, 2003.

2002

	The Status and Future of APC Software.  Solid State Technology, May, 2002.
	AMD Implements Genesis Program Across Facilities.  Semiconductor International, May, 2002.
	Automation for Statistically Based Monitoring of Outsourced Manufacturing.  Fabless Forum, Vol. 9, No. 1, March, 2002.

2001

	A Comparison of Run-to-Run Control Algorithms: A Tutorial.  Proc. Sematech AEC/APC Workshop XIII, October, 2001.
	A Survey of Run-to-Run Control Algorithms.  Proc. Sematech AEC/APC Workshop XIII, October, 2001.
	Selected Publications on Run-to-Run Control.  Proc. Sematech AEC/APC Workshop XIII, October, 2001.
	APC Software for 300 mm Fabs.  Semiconductor International, August, 2001.
	An Overview and Evaluation of Decision Tree Methodology.  Proc. ASA Conf. on Quality and Productivity, May, 2001.
	Advanced Statistical Process Control: Controlling sub-0.18µm Lithography and Other Processes.  SPIE Microlithography, Vol. 4344, No. 39, March, 2001.

2000

	Challenges for Use of Statistical Software Tools in the Semiconductor Industry.  Proc. Joint Statistical Meetings (JSM2000), August, 2000.
	Life Beyond Mix-and-Match: Controlling Sub-0.18µm Overlay Errors.  Semiconductor International, July, 2000.
	Data Mining for Yield Improvements.  Proc. Int'l Conf. on Modeling and Analysis of Semiconductor Manufacturing (MASM2000), May, 2000.
	Predictive Process Control for Sub-0.2µm Lithography.  SPIE Microlithography, Vol. 3998, No. 48, March, 2000.

1999

	The Emerging Role for Data Mining.  Solid State Technology, Vol. 42, No. 11, November, 1999.
	Advanced Statistical Tools for Improving Yield and Reliability. Proceedings of ISTFA, 1999.
	Yield Dynamics Turns to Data Mining for Semiconductor Yield Management.  Data Mining News, Vol. 2 No. 15, March 29, 1999.

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